Vacuum Pump Filters
Complete selection of filters including inlet filters, exhaust filters, oil mist eliminators, and specialty filters. Proper filtration extends pump life and ensures optimal performance.
Filter Types
Inlet Filters
Protect your vacuum pump from contaminants with high-quality inlet filters. Available for all pump types and sizes.
- Particulate removal
- Chemical resistance
- High flow capacity
- Easy replacement
Exhaust Filters
Oil mist eliminators and exhaust filters to capture oil vapor and maintain clean operation.
- Oil mist elimination
- Coalescing elements
- Charcoal filters
- HEPA options
Oil Mist Separators
High-efficiency oil mist separators for rotary vane and other oil-sealed vacuum pumps.
- 99.9% efficiency
- Extended life
- Low pressure drop
- Multiple sizes
Dust Filters
Industrial dust filters for vacuum systems handling particulate-laden gases and materials.
- Fine particle capture
- Pleated elements
- Washable options
- High dirt capacity
Chemical Filters
Activated carbon and chemical filters for removing corrosive gases and odors.
- Activated carbon
- Chemical adsorption
- Acid neutralization
- Custom blends
HEPA Filters
High-efficiency particulate air filters for critical applications requiring ultra-clean vacuum.
- 99.97% @ 0.3 micron
- Cleanroom grade
- Medical applications
- Certified performance
OEM & Compatible
Filters by Manufacturer
We stock OEM and compatible filters for all major vacuum pump brands
Edwards Filters
- EMF Oil Mist Filters
- Inlet Dust Filters
- Exhaust Filters
- Chemical Traps
Agilent/Varian Filters
- Oil Mist Eliminators
- Foreline Traps
- Inlet Filters
- Molecular Sieve Traps
Leybold Filters
- SOGEVAC Filters
- TRIVAC Filters
- Oil Separators
- Exhaust Filters
Welch Filters
- DuoSeal Filters
- Inlet Filters
- Exhaust Mist Eliminators
- Chemical Traps
Aftermarket Filters
- Universal Inlet Filters
- Replacement Elements
- Custom Filter Solutions
- Bulk Filter Media
Specialty Filters
- Foreline Traps
- Cold Traps
- Zeolite Traps
- Cryogenic Filters
Benefits of Proper Filtration
Pump Protection
Prevent contaminants from damaging internal pump components
Extended Life
Increase pump service intervals and overall lifespan
Clean Environment
Eliminate oil mist and maintain a clean workspace
Peak Performance
Maintain optimal vacuum levels and pumping speed
Need Help Selecting the Right Filter?
Our filter specialists can help you identify the correct filter for your pump model and application.